Top-down delayering to expose large inspection area on die side-edge with Platinum (Pt) deposition technique.
H. H. YapPik Kee TanG. R. LowM. K. DawoodH. FengY. Z. ZhaoRan HeH. TanJ. ZhuB. LiuY. M. HuangD. D. WangJeffery LamZ. H. MaiPublished in: Microelectron. Reliab. (2015)