Login / Signup
Annealing and Its Effect on Ultrathin HfON Gate Insulator Formation.
Dae-Hee Han
Shun'ichiro Ohmi
Published in:
IEICE Trans. Electron. (2013)
Keyphrases
</>
leakage current
simulated annealing
image processing
low cost
electrical properties
gate insulator
multiple views
power consumption
low voltage