Fabrication of nanobeam using Focused ion beam (FIB) and KOH etching.
Haitao ChengHeng YangYuelin WangPublished in: NEMS (2009)
Keyphrases
- integrated circuit
- electron beam
- magnetic recording
- plasma etching
- thin film
- high density
- computer simulation
- data sets
- electron beam lithography
- machine learning
- high energy
- low density
- cross section
- multiresolution
- social networks
- artificial intelligence
- artificial neural networks
- multimedia
- thin film transistor
- feature selection
- information systems