Automation methodology of local defocus monitoring on fixed chips in semiconductor fabrication.

Taesoo Shin Seulgi Ok Kibum Lee Sungwook Hwang

Published in: ICEIC (2023)

Keyphrases

integrated circuit
high density
high speed
monitoring system
plasma etching
semiconductor devices
real time
vision system
electron beam
semiconductor manufacturing
image sequences
super resolution
single image
design methodology
depth estimation