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Taesoo Shin
Publication Activity (10 Years)
Years Active: 2023-2023
Publications (10 Years): 1
Top Topics
High Density
Semiconductor Devices
Monitoring System
Plasma Etching
Top Venues
ICEIC
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Publications
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Taesoo Shin
,
Seulgi Ok
,
Kibum Lee
,
Sungwook Hwang
Automation methodology of local defocus monitoring on fixed chips in semiconductor fabrication.
ICEIC
(2023)