-Axis Silicon Microgyroscope.

Lu Xu Hongsheng Li Jia Liu Yunfang Ni Libin Huang

Published in: J. Sensors (2014)

Keyphrases

high density
low cost
real time
high speed
gallium arsenide
artificial intelligence
similarity measure
cross section
neural network
computer vision
decision making
image processing
low power
transmission electron microscopy
silicon dioxide