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Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics.
Takuji Ikemoto
Yasuo Kokubun
Published in:
IEICE Trans. Electron. (2007)
Keyphrases
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waveguide
high speed
antenna array
electro optic
multi layer
high data rate
high density
application layer
integrated circuit
electron beam
data sets
three dimensional
single layer
upper layer
middle layer
functional verification