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A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser.
Christos-Edward Athanasiou
Yves Bellouard
Published in:
Micromachines (2015)
Keyphrases
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silicon dioxide
high speed
high temperature
finite element
laser beam
space charge
electro mechanical systems
black box
real time
learning algorithm
artificial intelligence
low power
image acquisition
laser radar
leakage current