Combining lithography and Directed Self Assembly for the manufacturing of vias: Connections to graph coloring problems, integer programming formulations, and numerical experiments.
Dehia Ait-FerhatVincent JuliardGautier StaufferJ. Andres TorresPublished in: Eur. J. Oper. Res. (2020)
Keyphrases
- integer programming formulations
- integer programming
- quality control
- high density
- graph coloring problems
- constraint satisfaction problems
- manufacturing systems
- manufacturing processes
- manufacturing industry
- integrated circuit
- electron beam
- combining multiple
- semiconductor manufacturing
- finite difference
- product design
- production planning
- numerical methods
- real time
- scheduling problem
- state space
- neural network