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On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface.
Masaya Hagiwara
Tomohiro Kawahara
Toru Iijima
Taisuke Masuda
Yoko Yamanishi
Fumihito Arai
Published in:
MHS (2011)
Keyphrases
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high speed
real time
d objects
low cost
three dimensional
low power
geometric structure
metal oxide
object recognition
frame rate
graph structure
solid models
si sio