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Fabrication and Characterization of a High-Performance Multi-Annular Backscattered Electron Detector for Desktop SEM.
Wei-Ruei Lin
Yun-Ju Chuang
Chih-Hao Lee
Fan-Gang Tseng
Fu-Rong Chen
Published in:
Sensors (2018)
Keyphrases
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electron beam
electrical properties
database
genetic algorithm
high speed
detection algorithm
electron beam lithography
parallel processing
integrated circuit
data mining
general purpose
detection method
personal computer
high density
scientific computing