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Electrostatic discharge directly to the chip surface, caused by automatic post-wafer processing.

Peter JacobUwe ThiemannJoachim C. Reiner
Published in: Microelectron. Reliab. (2005)
Keyphrases
  • high speed
  • automatic processing
  • data processing
  • low cost
  • three dimensional
  • real time
  • surface model
  • d objects
  • information processing
  • semiconductor manufacturing
  • neural network
  • smooth surfaces
  • analog vlsi