O thin film by L-MBE.

Yong-ning He Jing-wen Zhang Xiaodong Yang Qing-an Xu Xinghui Liu Chang-Chun Zhu Xun Hou

Published in: Microelectron. J. (2005)

Keyphrases

thin film
high density
short circuit
electron microscopy
multi layer
grain size
solar cell
genetic algorithm
decision making
white light interferometry
machine learning
data center
plasma etching