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An IoT Solution for Condition Monitoring of a Lithography Coater Tool in a Semiconductor Fab.
Yvonne Bergmann
Michael Leippert
Juergen Kuehnle
Johannes Kristan
Sven Erik Jeroschewski
Lukas Römer
Paul Knaus
Axel Wogawa
Published in:
ICPS (2022)
Keyphrases
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condition monitoring
fault diagnosis
tool wear
fault detection
nuclear power plant
power transformers
optimal solution
management system
computational intelligence
steady state
big data
noise reduction
acoustic emission