A Novel Fault Detection Method for Semiconductor Manufacturing Processes.

Zhen Sun Jingli Yang Kexin Zheng

Published in: I2MTC (2019)

Keyphrases

detection method
manufacturing processes
fault diagnosis
manufacturing systems
fault detection
product quality
face detection
detection algorithm
feature detection
rapid prototyping
machine learning
artificial intelligence
case study
process control
saliency detection
machining processes