Manufacturing with DUV lithography.
Steven J. HolmesPeter H. MitchellMark C. HakeyPublished in: IBM J. Res. Dev. (1997)
Keyphrases
- quality control
- electron beam
- manufacturing systems
- manufacturing processes
- manufacturing environment
- manufacturing industry
- production planning
- operations management
- manufacturing process
- information systems
- industrial engineering
- production process
- information retrieval
- mass customization
- production line
- rapid prototyping
- three dimensional
- concurrent engineering