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Electrical characterization of aluminium oxide-aluminium thin film composites by impedance spectroscopy.
Katarzyna Tadaszak
Karol Nitsch
Tomasz Piasecki
Witold M. Posadowski
Published in:
Microelectron. Reliab. (2011)
Keyphrases
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thin film
electron microscopy
short circuit
room temperature
silicon nitride
x ray
transmission line
high density
grain size
multi layer
infrared
neural network
solar cell
electrical properties
white light interferometry
low cost
data analysis
learning algorithm