KOH anisotropic etching of Si wafers for LED electrode arrays.
Jian-Yang LinPai-Yu ChangPublished in: NEMS (2011)
Keyphrases
- integrated circuit
- thin film
- solar cell
- plasma etching
- metal oxide
- electric field
- spatially variant
- magnetic recording
- electron beam
- anisotropic diffusion
- information retrieval
- diffusion equation
- semiconductor manufacturing
- medical images
- high speed
- database replication
- diffusion filtering
- information systems
- artificial intelligence