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Measurement of Thermal Diffusivity of Thin Film in Thickness Direction Using an Ordinary Dielectric Film as the Sensor.

Shijie ChenFeihu ZhengChenyu HuangYewen Zhang
Published in: IEEE Trans. Instrum. Meas. (2022)
Keyphrases
  • film thickness
  • electrical properties
  • thin film
  • data acquisition
  • chemical vapor deposition
  • sensor networks
  • room temperature
  • white light interferometry
  • data streams
  • high density
  • nonlinear diffusion
  • grain size