Accelerated deep self-supervised ptycho-laminography for three-dimensional nanoscale imaging of integrated circuits.
Iksung KangYi JiangMirko HollerManuel Guizar-SicairosA. F. J. LeviJeffrey KlugStefan VogtGeorge BarbastathisPublished in: CoRR (2023)
Keyphrases
- integrated circuit
- three dimensional
- atomic force microscopy
- photon counting
- confocal microscopy
- internal structures
- image analysis
- image processing
- micro ct
- electron beam
- human body
- high resolution
- image sequences
- medical imaging
- synthetic aperture
- physical models
- range images
- d objects
- multi view
- x ray
- deep learning
- three dimensional objects
- imaging systems
- virtual reality
- printed circuit boards
- image sensor
- acquired images
- mechanical properties
- surface model
- data acquisition
- digital holography
- computer vision