On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies.
Usama ZaghloulGeorge J. PapaioannouBharat BhushanFabio CoccettiPatrick PonsRobert PlanaPublished in: Microelectron. Reliab. (2011)
Keyphrases
- knowledge acquisition
- knowledge base
- expert systems
- domain knowledge
- failure rate
- mechanism design
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- mobile devices
- computational models
- data mining techniques
- reasoning mechanisms
- data sets
- higher level
- knowledge representation
- information systems
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- real world