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Influence of the surrounding ambient on the reliability of the electrical characterization of thin oxide layers using an atomic force microscope.

W. HouraniB. GautierLiviu MilitaruD. AlbertiniA. Descamps-MandineR. Arinero
Published in: Microelectron. Reliab. (2011)
Keyphrases
  • electrical properties
  • ambient intelligence
  • visual inspection
  • three dimensional
  • multi layer
  • multiple layers
  • low voltage
  • silicon nitride
  • real time
  • social networks
  • image analysis
  • transmission line
  • power grid