Lorentz Force Magnetic Sensors Based on Piezoelectric Aluminum Nitride on Silicon Micromechanical Resonators.
Sagnik GhoshJoshua E.-Y. LeePublished in: NEMS (2018)
Keyphrases
- gate insulator
- integrated circuit
- metal oxide semiconductor
- force sensing
- contact force
- sensor data
- thin film
- real time
- sensor networks
- data fusion
- low cost
- magnetic field
- high speed
- multi sensor
- high density
- data acquisition
- high voltage
- semidefinite
- plasma etching
- silicon nitride
- sensor technology
- solid state
- force feedback
- gallium arsenide