Design, modeling and control of a modular contactless wafer handling system.
Bassem DahrougGuillaume J. LaurentValérian GuelpaNadine Le Fort-PiatPublished in: ICRA (2015)
Keyphrases
- mechanical systems
- design process
- computer aided
- highly flexible
- user interface
- control system
- real time control
- intelligent control
- modeling language
- modeling method
- optimal design
- design decisions
- modeling tool
- design procedure
- controller design
- design methodology
- database
- control method
- embedded systems
- expert systems
- bayesian networks
- case study
- e learning