An ASIC for readout of post-processed thin-film MEMS resonators by employing capacitive interfacing and active parasitic cancellation.
Liechao HuangWarren Rieutort-LouisAlexandra GualdinoLaura TeagnoYingzhe HuJaoa MouroJosue Sanz-RobinsonJames C. SturmSigurd WagnerVirginia ChuJoao Pedro CondeNaveen VermaPublished in: VLSIC (2014)
Keyphrases
- thin film
- post processed
- post processing
- short circuit
- high density
- multi layer
- integrated circuit
- solar cell
- neural network
- grain size
- application specific
- hardware architecture
- genetic algorithm
- machine learning
- white light interferometry
- chemical vapor deposition
- design methodology
- electron microscopy
- single chip
- lessons learned
- high resolution
- data analysis
- data mining