Micro-fabricated polymeric thermal actuators array for rectifying the deformation of MEMS substrate.
Xinghua WangDingbang XiaoZhihua ChenZhanqiang HouXuezhong WuJianbin SuPublished in: NEMS (2013)
Keyphrases
- analog to digital converter
- high speed
- infrared
- degrees of freedom
- control system
- image sensor
- image registration
- mathematical model
- focal plane
- strain energy
- electron beam
- power plant
- visible spectrum
- finite element analysis
- contact force
- magnetic recording
- semiconductor devices
- deformation model
- thermal images
- high temperature
- charge coupled device
- electro mechanical systems
- solder ball connect
- neural network
- deformable objects