Detection of failure mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera.
Ivo VogtTomonori NakamuraIngrid De WolfChristian BoitPublished in: Microelectron. Reliab. (2018)
Keyphrases
- false alarms
- real time
- single camera
- object detection
- field of view
- hand held
- automatic detection
- vision system
- detection algorithm
- false positives
- video camera
- multiple images
- spectral resolution
- spectral analysis
- focal length
- surveillance system
- position and orientation
- ccd camera
- detection rate
- multispectral imaging