Investigation of Sub-20nm 4th generation DRAM cell transistor's parasitic resistance and scalable methodology for Sub-20nm era.
Shinwoo JeongJin-Seong LeeJiuk JangJooncheol KimHyunsu ShinJi Hun KimJeongwoo SongDongsoo WooJeonghoon OhJooyoung LeePublished in: IRPS (2023)