Fabrication of a novel micro liquid flow sensor using a TaN thin film.
Chen-Kuei ChungT. C. ChenT. R. ShihW. T. ChangPublished in: NEMS (2009)
Keyphrases
- thin film
- high density
- plasma etching
- navier stokes equations
- chemical vapor deposition
- sensor data
- water flow
- short circuit
- low density
- sensor networks
- mathematical model
- flow rate
- integrated circuit
- bayesian networks
- grain size
- boundary conditions
- liquid crystal displays
- white light interferometry
- data center
- multi layer
- text categorization
- high speed
- decision making
- computational fluid dynamics
- bayesian network classifiers
- solar cell
- artificial neural networks
- learning algorithm
- machine learning
- neural network