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SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic thin film.
Sen Yao
Shunji Goto
Junpei Sakurai
Tadahiko Shinshi
Minoru Uehara
Hitoshi Yamamoto
Published in:
NEMS (2009)
Keyphrases
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thin film
film thickness
high density
solar cell
short circuit
magnetic field
control system
degrees of freedom
multi layer
mathematical model
electron microscopy
grain size
neural network
data mining
decision makers