Shunji Goto

Publication Activity (10 Years)

Years Active: 2009-2009
Publications (10 Years): 0

Publications

Sen Yao, Shunji Goto, Junpei Sakurai, Tadahiko Shinshi, Minoru Uehara, Hitoshi Yamamoto
SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic thin film. NEMS (2009)