Login / Signup

Polymer self assembly in semiconductor microelectronics.

Charles T. BlackRicardo RuizGregory BreytaJoy Y. ChengMatthew E. ColburnKathryn W. GuariniHo-Cheol KimYing Zhang
Published in: IBM J. Res. Dev. (2007)
Keyphrases
  • electron beam lithography
  • semiconductor manufacturing
  • high power
  • gallium arsenide
  • x ray
  • room temperature
  • electron beam
  • si sio
  • artificial intelligence
  • decision making
  • reinforcement learning
  • data structure