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Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance.

Nicholas A. StrnadRyan R. KnightRyan Q. RudyRobert R. BenoitWendy L. SarneyJeffrey S. Pulskamp
Published in: PLANS (2023)
Keyphrases
  • thin film
  • multi layer
  • film thickness
  • high density
  • short circuit
  • plasma etching
  • chemical vapor deposition
  • room temperature
  • grain size
  • solar cell
  • neural network
  • three dimensional
  • database systems