Experimental study of a micro-rotor fabricated on a silicon wafer.
Terunobu AkiyamaKatsufusa ShonoPublished in: Adv. Robotics (1991)
Keyphrases
- experimental study
- high speed
- cmos technology
- silicon on insulator
- semiconductor manufacturing
- integrated circuit
- electron beam
- mathematical model
- experimental evaluation
- low power
- massively parallel
- semiconductor devices
- charge coupled device
- image acquisition
- synthetic datasets
- induction motor
- low cost
- high density
- fault diagnosis
- real time
- parallel processing
- liquid crystal
- steady state
- image sensor
- operating conditions
- power consumption