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Fabrication and characterization of silicon nitride nanopore.

Lingzhi WuHang LiuYuqi LiuHao ChenQuanjun LiuZuhong Lu
Published in: BMEI (2013)
Keyphrases
  • electrical properties
  • high density
  • high speed
  • integrated circuit
  • thin film
  • electron beam
  • real time
  • information systems
  • high quality
  • multiscale
  • search algorithm
  • high temperature