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A precision capacitance cell for measurement of thin film out-of-plane expansion. III. Conducting and semiconducting materials.

Chad R. SnyderFrederick I. Mopsik
Published in: IEEE Trans. Instrum. Meas. (2001)
Keyphrases
  • thin film
  • high density
  • short circuit
  • high speed
  • high precision
  • solar cell
  • electron microscopy
  • multi layer
  • three dimensional
  • grain size
  • chemical vapor deposition
  • neural network
  • unit length