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Thermal approach of defects generation on copper/organic dielectric interface due to SEM inspections.
Lionel Dantas de Morais
F. Allanic
F. Roqueta
J. P. Rebrasse
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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defect detection
electrical properties
printed circuit boards
user interface
user friendly
real time
information retrieval
information systems
metadata
generation process
magnetic recording
automated visual inspection