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Fabrication of Concave Microwells and Microchannels by Off-stoichiometry Thiol-ene (OSTE) Backside Lithography.
Muyang Zhang
Haonan Li
Zhiqing Xiao
Zitao Feng
Shangneng Yu
Zejingqiu Chen
Huiru Zhang
Weijin Guo
Published in:
NEMS (2023)
Keyphrases
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electron beam
electron beam lithography
integrated circuit
x ray
piecewise linear
objective function
semiconductor devices
design parameters
high density
convexity properties
high speed
probability distribution
dynamic programming
hidden markov models
convex functions
cooperative
information systems
real time