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Reduction of annealed-induced wafer defects in dual-damascene copper interconnects.
Yasmin Abdul Wahab
Anuar Fadzil Ahmad
Hanim Hussin
Norhayati Soin
Published in:
Microelectron. Reliab. (2012)
Keyphrases
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integrated circuit
printed circuit boards
input output
electron beam
particle filtering
thin film
surface defects
sampling procedure
defect detection
reduction method
particle filter
primal dual
database
human motion
lower cost
markov chain
high speed
information systems