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Influence of charge balance on the robustness of trench-based super junction diodes.

Ana Villamor-BaliardaPiet VanmeerbeekMichele RiccioVincenzo d'AlessandroAndrea IraceJaume RoigDavid FloresPeter Moens
Published in: Microelectron. Reliab. (2012)
Keyphrases
  • space charge
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  • high robustness