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Performance-optimized gate-first 22-nm SOI technology with embedded DRAM.

G. FreemanP. ChangE. R. EngbrechtK. J. GiewontD. F. HilscherM. LagusT. J. McArdleB. MorgenfeldShreesh NarasimhaJames P. NorumK. A. NummyPaul C. ParriesG. WangJonathan K. WinslowPaul D. AgnelloRajeev Malik
Published in: IBM J. Res. Dev. (2015)
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