The Fabrication of Three-layer Silicon Stacked Antenna.

Cao Yang Lei Zhu Jian Hou Fang Jiao Zong Lei Huang Min

Published in: NEMS (2021)

Keyphrases

high density
silicon dioxide
plasma etching
high speed
semiconductor devices
multi layer
antenna array
integrated circuit
deep space
electron beam
low density
thin film
real time
data center
low cost
data sets
field effect transistors
image sequences
resonant frequency