-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication.
Zhi-Wen LinShao-Yun FangYao-Wen ChangWei-Cheng RaoChieh-Hsiung KuanPublished in: IEEE Trans. Very Large Scale Integr. Syst. (2018)
Keyphrases
- electron beam
- integrated circuit
- traveling salesman problem
- semiconductor devices
- x ray
- scheduling problem
- scheduling algorithm
- design parameters
- travelling salesman
- search space
- parallel machines
- ant colony optimization
- nearest neighbor
- resource allocation
- round robin
- genetic algorithm
- combinatorial optimization
- resource constraints
- optimization problems
- electron beam lithography