Xiaolan Zhong

Publication Activity (10 Years)

Years Active: 2017-2021
Publications (10 Years): 6

Top Topics

Cmos Technology

Optimization Process

Diffusion Filtering

High Temperature

Top Venues

Publications

Ming Li, Xiaoxu Kang, Xiaolan Zhong
Process Optimization for CMOS Compatible MEMS Capacitive Acoustic Sensor. ASICON (2021)
Xiaoxu Kang, Xiaolan Zhong, Zhangfa Chen, Zhengkai Dao, Qiang Zhang, Hao Wan, Yamin Zhou, Ming Li, Yingjia Guo, Ran Nie, Tao Wu
Development and Characterization of High Temperature Plasma Nitridation Process for Advanced CMOS Technology Application. ASICON (2021)
Ming Li, Xiaoxu Kang, Xiaolan Zhong
A Novel Etch Scheme to Form Sloped Profile by Standard Anisotropic CMOS Process. ASICON (2021)
Bo Zhang, Xiaoxu Kang, Xiaolan Zhong
Optimization of Protective Layer Process for Micro-bridge Structure based MEMS/Sensors Application. ASICON (2021)
Xiaoxu Kang, Xiaolan Zhong, Ming Li
Development and Optimization of Contact Module Process for Micro-Bridge Structure based MEMS/Sensor Application. ASICON (2019)
Xiaoxu Kang, Limin Zhu, Xingwang Zhu, Qingyun Zuo, Xiaolan Zhong, Shoumian Chen, Yuhang Zhao, Shanshan Liu, Hanwei Lu, Jianmin Wang, Wei Wang, Bo Zhang
Development and characterization of TaN thin film resistor with CMOS compatible fabrication process. ASICON (2017)