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Development and characterization of TaN thin film resistor with CMOS compatible fabrication process.

Xiaoxu KangLimin ZhuXingwang ZhuQingyun ZuoXiaolan ZhongShoumian ChenYuhang ZhaoShanshan LiuHanwei LuJianmin WangWei WangBo Zhang
Published in: ASICON (2017)
Keyphrases
  • thin film
  • high density
  • development process
  • high speed
  • software engineering
  • neural network
  • machine learning
  • bayesian networks
  • decision makers
  • multi layer
  • short circuit