Wenze Yao

Publication Activity (10 Years)

Years Active: 2023-2023
Publications (10 Years): 2

Top Topics

Support Vector Machine Svm

Optimization Algorithm

Computational Complexity

Top Venues

Microelectron. J.

IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.

Publications

Wenze Yao, Hongcheng Xu, Haojie Zhao, Ming Tao, Jie Liu
Fast and accurate proximity effect correction algorithm based on pattern edge shape adjustment for electron beam lithography. Microelectron. J. 133 (2023)
Wenze Yao, Haojie Zhao, Chengyang Hou, Wei Liu, Hongcheng Xu, Xin Zhang, Jing Xiao, Jie Liu
Efficient Proximity Effect Correction Using Fast Multipole Method With Unequally Spaced Grid for Electron Beam Lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 42 (1) (2023)