Efficient Proximity Effect Correction Using Fast Multipole Method With Unequally Spaced Grid for Electron Beam Lithography.
Wenze YaoHaojie ZhaoChengyang HouWei LiuHongcheng XuXin ZhangJing XiaoJie LiuPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2023)
Keyphrases
- cost function
- computationally efficient
- high accuracy
- high efficiency
- high precision
- experimental evaluation
- preprocessing
- classification accuracy
- optimization algorithm
- clustering method
- prior knowledge
- computational cost
- probabilistic model
- three dimensional
- edge detection
- model selection
- computational complexity
- support vector machine svm
- detection algorithm
- segmentation method
- objective function
- similarity measure