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Wenlan Jiang
ORCID
Publication Activity (10 Years)
Years Active: 2021-2021
Publications (10 Years): 2
Top Topics
Prediction Accuracy
Deep Learning
Process Control
Top Venues
ICCPR
CICAI
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Publications
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Fuzuo Zhang
,
Wenlan Jiang
,
Huan-gang Wang
Virtual Metrology for Semiconductor Chemical Mechanical Planarization Process Using Wide & Deep Learning.
ICCPR
(2021)
Wenlan Jiang
,
Chunpu Lv
,
Tao Zhang
,
Huan-gang Wang
Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process.
CICAI
(2021)