Chunpu Lv

Publication Activity (10 Years)

Years Active: 2021-2023
Publications (10 Years): 3

Top Topics

Prediction Accuracy

Random Variables

Database Systems

Chemical Reaction

Top Venues

Publications

Chunpu Lv, Jingwei Huang, Ming Zhang, Huangang Wang, Tao Zhang
Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization. Sensors 23 (9) (2023)
Chunpu Lv, Tao Zhang, Huangang Wang
Material Removal Rate Prediction with Phase Sensitive Variables Selection and Phase Partition. ICAC (2022)
Wenlan Jiang, Chunpu Lv, Tao Zhang, Huan-gang Wang
Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process. CICAI (2021)