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Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process.

Wenlan JiangChunpu LvTao ZhangHuan-gang Wang
Published in: CICAI (2021)
Keyphrases
  • process control
  • prediction accuracy
  • virtual reality
  • prediction model
  • chemical reaction
  • genetic algorithm
  • development process